ISO/TS 25138:2025
International Standard
Current Edition
·
Approved on
20 February 2025
Surface chemical analysis — Analysis of metal oxide films by glow discharge optical emission spectrometry
ISO/TS 25138:2025 Files
English
39 Pages
Current Edition
84.42 OMR
ISO/TS 25138:2025 Scope
This document specifies a glow discharge optical emission spectrometric method for the determination of the thickness, mass per unit area and chemical composition of metal oxide films.
This method is applicable to oxide films 5 nm to 10 000 nm thick on metals. The metallic elements of the oxide can include one or more from Fe, Cr, Ni, Cu, Ti, Si, Mo, Zn, Mg, Mn, Zr and Al. Other elements that can be determined by the method are O, C, N, H, P and S.
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