ISO 11505:2025

International Standard   Current Edition · Approved on 19 June 2025

Surface chemical analysis — General procedures for quantitative compositional depth profiling by glow discharge optical emission spectrometry

ISO 11505:2025 Files

English 34 Pages
Current Edition
74.26 OMR

ISO 11505:2025 Scope

This document specifies a glow discharge optical emission spectrometric (GD-OES) method for the determination of the thickness, mass per unit area and chemical composition of surface layer films.

The applicability of this document is limited to description of general procedures for quantification of the chemical composition and thickness in GD-OES compositional depth profiling. This document is not directly applicable for quantification of individual materials having various thicknesses and elements to be determined.

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