ISO 23131-3:2026
International Standard
Current Edition
·
Approved on
30 January 2026
Ellipsometry — Part 3: Transparent single layer model
ISO 23131-3:2026 Files
English
29 Pages
Current Edition
OMR
76.21
ISO 23131-3:2026 Scope
This document uses ellipsometric measurements and their analysis to specify the method for the determination of the layer thickness d of a transparent layer and the optical (refractive index n) or dielectric (real part ε1) constants/functions based on the transparent single layer model within a spectral region, for which k = 0 applies.
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