ISO 23131-3:2026

International Standard   Current Edition · Approved on 30 January 2026

Ellipsometry — Part 3: Transparent single layer model

ISO 23131-3:2026 Files

English 29 Pages
Current Edition
OMR 73.25

ISO 23131-3:2026 Scope

This document uses ellipsometric measurements and their analysis to specify the method for the determination of the layer thickness d of a transparent layer and the optical (refractive index n) or dielectric (real part ε1) constants/functions based on the transparent single layer model within a spectral region, for which k = 0 applies.

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