ISO 21360-6:2023
International Standard
Current Edition
·
Approved on
06 December 2023
Vacuum technology — Standard methods for measuring vacuum-pump performance — Part 6: Cryogenic vacuum pumps
ISO 21360-6:2023 Files
English
12 Pages
Current Edition
OMR
31.09
ISO 21360-6:2023 Scope
This document specifies methods for measuring the volume flow rate, maximum throughput, pumping capacity, base pressure cryogenic vacuum pump, cooldown time and crossover value of cryogenic vacuum pumps.
It is applicable to two-stage, closed-loop gaseous helium cryogenic vacuum pumps, which can be directly flanged to a vacuum chamber.
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