ISO 25178-604:2025
International Standard
Current Edition
·
Approved on
14 February 2025
Geometrical product specifications (GPS) — Surface texture: Areal — Part 604: Design and characteristics of non-contact (coherence scanning interferometry) instruments
ISO 25178-604:2025 Files
English
23 Pages
Current Edition
OMR
66.97
ISO 25178-604:2025 Scope
This document specifies the design and metrological characteristics of coherence scanning interferometry (CSI) instruments for the areal measurement of surface topography. Because surface profiles can be extracted from surface topography data, the methods described in this document are also applicable to profiling measurements.
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