ISO 23420:2021

International Standard   Current Edition
· Approved on 23 April 2021 ·

Microbeam analysis — Analytical electron microscopy — Method for the determination of energy resolution for electron energy loss spectrum analysis

Physicochemical methods of analysis
Including spectrophotometric and chromatographic analysis

ISO 23420:2021 Files

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Current Edition

ISO 23420:2021 Scope

This document specifies a determination procedure of energy resolution in the scanning transmission electron microscope or the transmission electron microscope equipped with the electron energy loss (EEL) spectrometer.

This document is applicable to both in-column type EEL spectrometer and post-column type EEL spectrometer. These EEL signal detecting systems are applicable to a parallel detecting system and a serial detecting system.

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