ISO/TS 21383:2021
International Standard
Current Edition
·
Approved on
12 March 2021
Microbeam analysis — Scanning electron microscopy — Qualification of the scanning electron microscope for quantitative measurements
ISO/TS 21383:2021 Files
English
59 Pages
Current Edition
96.12 OMR
ISO/TS 21383:2021 Scope
This document describes methods to qualify the scanning electron microscope with the digital imaging system for quantitative and qualitative SEM measurements by evaluating essential scanning electron microscope performance parameters to maintain the performance after installation of the instruments. The items and evaluating methods of the performance parameters are selected by users for their own purposes.
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