GSO IEC 62047-21:2021
IEC 62047-21:2014
Gulf Standard
Current Edition
·
Approved on
01 July 2021
Semiconductor devices - Micro-electromechanical devices - Part 21: Test method for Poisson's ratio of thin film MEMS materials
GSO IEC 62047-21:2021 Files
English
26 Pages
Current Edition
Reference Language
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GSO IEC 62047-21:2021 Scope
IEC 62047-21:2014 specifies the determination of Poisson's ratio from the test results obtained by the application of uniaxial and biaxial loads to thin-film micro-electromechanical systems (MEMS) materials with lengths and widths less than 10 mm and thicknesses less than 10 µm.
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