GSO IEC 62047-8:2014
IEC 62047-8:2011
Gulf Standard
Current Edition
·
Approved on
25 December 2014
Semiconductor devices - Micro-electromechanical devices - Part 8: Strip bending test method for tensile property measurement of thin films
GSO IEC 62047-8:2014 Files
English
36 Pages
Current Edition
Reference Language
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GSO IEC 62047-8:2014 Scope
This international standard specifies the strip bending test method to measure tensile
properties of thin films with high accuracy, repeatability, moderate effort of alignment and
handling compared to the conventional tensile test. This testing method is valid for test pieces
with a thickness between 50 nm and several µm, and with an aspect ratio (ratio of length to
thickness) of more than 300.
The hanging strip (or bridge) between two fixed supports are widely adopted in MEMS or
micro-machines. It is much easier to fabricate these strips than the conventional tensile test
pieces. The test procedures are so simple to be readily automated. This international
standard can be utilized as a quality control test for MEMS production since its testing
throughput is very high compared to the conventional tensile test.
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