OS GSO ISO 23131:2025
ISO 23131:2021
Omani Standard
Current Edition
·
Approved on
22 April 2025
Ellipsometry — Principles
OS GSO ISO 23131:2025 Files
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OS GSO ISO 23131:2025 Scope
This document specifies a method for determining optical and dielectric constants in the UV-VIS-NIR spectral range as well as layer thicknesses in the field of at-line production control, quality assurance and material development through accredited test laboratories.
It is applicable to stand-alone measuring systems. The presentation of the uncertainty of results conforms to ISO/IEC Guide 98-3.
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