OS GSO ISO 25178-604:2026
ISO 25178-604:2025
Omani Standard
Current Edition
·
Approved on
17 September 2026
Geometrical product specifications (GPS) — Surface texture: Areal — Part 604: Design and characteristics of non-contact (coherence scanning interferometry) instruments
OS GSO ISO 25178-604:2026 Files
English
23 Pages
Current Edition
Reference Language
OMR
62.49
OS GSO ISO 25178-604:2026 Scope
This document specifies the design and metrological characteristics of coherence scanning interferometry (CSI) instruments for the areal measurement of surface topography. Because surface profiles can be extracted from surface topography data, the methods described in this document are also applicable to profiling measurements.
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