ISO 25178-603:2025
International Standard
Current Edition
·
Approved on
14 February 2025
Geometrical product specifications (GPS) — Surface texture: Areal — Part 603: Design and characteristics of non-contact (phase shifting interferometry) instruments
ISO 25178-603:2025 Files
English
18 Pages
Current Edition
OMR
49.61
ISO 25178-603:2025 Scope
This document specifies the design and metrological characteristics of phase shifting interferometry (PSI) instruments for the areal measurement of surface topography. Because surface profiles can be extracted from areal surface topography data, the methods described in this document are also applicable to profiling measurements.
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